METALLOXYDIERUNGSANORDNUNG UND VERFAHREN.,申请号DE19896019084T-传众专利搜索

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发明名称	METALLOXYDIERUNGSANORDNUNG UND VERFAHREN.
摘要
申请公布号	DE68919084(T2)	申请公布日期	1995.04.20
申请号	DE19896019084T	申请日期	1989.08.02
申请人	OSAKA SANSO KOGYO K.K., OSAKA, JP;OHMI, TADAHIRO, SENDAI, MIYAGI, JP	发明人	OHMI, TADAHIRO 1-17-301,, MIYAGI-KEN 980, JP;SUGIYAMA, KAZUHIKO SANRAIFU-NAGAMACHI, SENDAI-SHI MIYAGI-KEN 980, JP;NAKAHARA, FUMIO SANKEN-HAITSU-KOIWA, EDOGAWA-KU TOKYO 103, JP;MIZOKAMI, SATOSHI SAIWAI-GARDENMANSION, SENDAI-SHI MIYAGI-KEN 980, JP
分类号	C23C8/18;C23C8/10;H01L21/31;(IPC1-7):C23C8/10;C23C8/14	主分类号	C23C8/18
代理机构		代理人
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