| 摘要 |
PURPOSE:To improve the raw material yield in OVD(outer vapor deposition) and to reduce the production cost. CONSTITUTION:A fine particle current from a burner 10 is switched into the horizontal and flat current in the axial direction of a target rod 20 and the vertical and flat current orthogonal to the axial direction, and the moving base 16 of the burner 10 is moved upward along a rail 17 when a columnar fine glass particle deposit 30 is grown as the deposition proceeds and the diameter is increased to direct the particle current in the direction in contact with the upper surface of the deposit 30, and an exhaust pipe moving base 42 is moved downward along a rail 43 to lower an exhaust pipe 40 and to direct it upward. |
