| 摘要 |
An apparatus and method for fabricating a flat panel display having a display area greater than 645 square centimeters. The flat panel display is comprised of an upper glass plate and a lower glass plate and has data generation material interposed between the upper glass plate and the lower glass plate. The flat panel display is formed by aligning the suitably etched upper glass plate with respect to the suitably etched lower glass plate in the X, Y, and Z planes. During formation, the upper glass plate has spacing devices disposed on the lower side thereof and the lower glass plate has bonding material deposited on the upper side thereof. The apparatus includes a lower plate XY stage device for supporting the lower glass plate, the lower plate XY stage device being adjustable in the X and Y planes. An upper plate positioning stage device is included for supporting the upper glass plate. The upper plate positioning stage device has gimbal devices that permit motion of the upper glass plate in the X, Y and Z planes and in pitch and yaw. A Z-axis drive device positions the upper plate with respect to the lower glass plate. A vacuum device draws a vacuum around and between the upper and lower glass plates, which vacuum urges the lower surface of the upper glass plate into parallel aligmnent with the upper surface of the lower glass plate, spaced apart by the spacing devices. An alignment device aligns the upper and lower glass plates while a curing device the sets of the bonding material, bonding the upper and lower glass plates together.
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