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发明名称
VERFAHREN ZUR FÖRDERUNG VON CHEMIKALIENLÖSUNGEN IN DER HALBLEITERINDUSTRIE SOWIE ANLAGE ZUR DURCHFÜHRUNG DES VERFAHRENS.
摘要
申请公布号
AT120101(T)
申请公布日期
1995.04.15
申请号
AT19910109214T
申请日期
1991.06.06
申请人
UHDE GMBH
发明人
VAN DEN BOSSCHE, ANDRE
分类号
C07B61/00;B01J4/00;F17D1/14;(IPC1-7):B01J4/00;F04F1/12
主分类号
C07B61/00
代理机构
代理人
主权项
地址
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