SEMICONDUCTOR ACCELERATION SENSOR

摘要

PURPOSE:To provide a semiconductor acceleration sensor for detecting the acceleration accurately over a wide frequency range while resisting against excessive impact or an acceleration close to oscillation frequency. CONSTITUTION:An overlapped part 3 is formed in the center of a semiconductor substrate 2 using a semiconductor fabrication technology. The overlapped part 3 is supported freely rockably with respect to the peripheral outer frame part 5 by a thin strain imparting part 4 to which a viscoelastic body 6 is attached on the surface or rear thereof. Consequently, even if the sensor part 1 is subjected to excessive impact, the viscoelastic body 6 buffers the impact applied to the strain imparting part 4 which is thereby protected against being damaged. The viscoelastic body 6 also prevents the amplitude of vibration at the overlapped part 3 from being maximized in the vicinity of resonance frequency thus improving the frequency characteristics of semiconductor acceleration sensor.