发明名称 HOT CATHODE FOR ELECTRON RADIATION, ITS MANUFACTURE, AND ELECTRON BEAM WORKING DEVICE USING IT
摘要 PURPOSE:To stably radiate an electron beam for a long time by impregnating an ion impact resisting high melting point heat resisting material with an electron emitting material having a relatively small work function and a high electron emitting current density. CONSTITUTION:A hot cathode 1 contains an ion impact resisting high melting point heat resisting material 2 and an electron emitting material 3 operable at low vacuum and low temperature having a low work function selected from yttrium boride, lanthanum boride, cerium boride, cesium oxide and cesium boride. As the material having high resistance to ion impact, metals having melting points of 2400 deg.C or more (for example, tangusten, rhenium, osmium, tantalum, molybdenum, niobium and iridium) or carbides of these high melting point heat resisting metals, or borides of these high melting point heat resisting metals. Since zirconium has a low melting point as the metal, but its carbide and boride have melting points of 3000 deg.C or more, it can be used as the material 2.
申请公布号 JPH0794072(A) 申请公布日期 1995.04.07
申请号 JP19940170933 申请日期 1994.07.22
申请人 NEC KANSAI LTD;NEC CORP 发明人 SUGIMURA TOSHIKAZU;NARITA KAZUNORI;KAWASE YUTAKA;NAKAMURA TSUYOSHI;ISHIDA HISANORI
分类号 H01J1/15;H01J1/14;H01J9/04;H01J37/06;H01J37/30 主分类号 H01J1/15
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