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发明名称
MAGNETIC FIELD-PROVIDED MICROWAVE PLASMA PROCESSING DEVICE
摘要
申请公布号
JPH0794297(A)
申请公布日期
1995.04.07
申请号
JP19930240842
申请日期
1993.09.28
申请人
SUMITOMO METAL IND LTD
发明人
KATAYAMA KATSUO
分类号
H05H1/46;C23F4/00;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H05H1/46;H01L21/306
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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