| 摘要 |
PURPOSE:To provide a highly precise actuator device which can obtain a stable high voltage of optical frequency having optional waveform and has small variance in output voltage characteristics. CONSTITUTION:In converter blocks 14 and 17, resistance in resistance groups of R-2R ladder resistance blocks 13 and 16 to which a DC high voltage is impressed, are switched in order at extremely short intervals of time with the digital signal from a digital signal generator 11 so as to obtain the AC high voltage of specific frequency. And, an actuator is driven and controlled with high-voltage alternating currents from the converter blocks 14 and 17, so the high voltage of optional frequency among frequencies of 0-several kHz can stably be obtained at the voltage boosting ratio and the actuator can be used as a common article as every type of actuator of optional frequency ranging from 0-several kHz. The device does not have conventional variance in output voltage characteristics due to the temperature drift of an amplifier and variance of component characteristics and the highly precise driving control over the actuator 19 can be performed. |
