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发明名称
PLASMA ETCHING APPARATUS
摘要
申请公布号
KR950002450(Y1)
申请公布日期
1995.04.04
申请号
KR19920009859U
申请日期
1992.06.04
申请人
HYUNDAI ELECTRONICS CO., LTD.
发明人
PARK, HAE - SONG
分类号
H01L21/302;(IPC1-7):H01L21/302
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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