发明名称 METHOD FOR FABRICATING A SEMICONDUCTOR-INTEGRATED CIRCUIT
摘要 A method for selectively diffusing gold into a silicon substrate, wherein a plurality of circuit elements spaced from each other are formed on a surface portion of the substrate and a gold layer, not covering the PN-junction exposed at the surface thereof, is deposited on the surface of a specific circuit element which is desired to have a high-switching speed and then said gold is subjected to thermal treatment so that said deposited gold may be diffused into said specific circuit element.
申请公布号 US3645808(A) 申请公布日期 1972.02.29
申请号 USD3645808 申请日期 1968.04.24
申请人 HITACHI LTD. 发明人 TAKAMITSU KAMIYAMA;MICHIYOSHI MAKI
分类号 H01L21/00;H01L21/22;H01L21/82;(IPC1-7):H01L7/34 主分类号 H01L21/00
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