FORMATION OF THIN FILM,申请号JP19930231398-传众专利搜索

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发明名称	FORMATION OF THIN FILM
摘要
申请公布号	JPH0786165(A)	申请公布日期	1995.03.31
申请号	JP19930231398	申请日期	1993.09.17
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	SHIBUYA MUNEHIRO;KITAGAWA MASATOSHI;HAYASHI SHIGENORI;KAMATA TAKESHI;HIRAO TAKASHI
分类号	C23C14/02;C23C14/34;C23C14/40;H01L21/203;H01L21/31;(IPC1-7):H01L21/203	主分类号	C23C14/02
代理机构		代理人
主权项
地址

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