IC-Analysesystem mit einer Ladungsteilchenstrahlvorrichtung,申请号DE19944433733-传众专利搜索

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发明名称	IC-Analysesystem mit einer Ladungsteilchenstrahlvorrichtung
摘要
申请公布号	DE4433733(A1)	申请公布日期	1995.03.23
申请号	DE19944433733	申请日期	1994.09.21
申请人	ADVANTEST CORP., TOKIO/TOKYO, JP	发明人	GOISHI, AKIRIA, KAZOSHI, SAITAMA, JP;KURIHARA, MASAYUKI, GYODASHI, SAITAMA, JP;UEDA, KOSHI, TOKIO/TOKYO, JP
分类号	G01Q30/00;G01R31/307;(IPC1-7):G01R31/305;H01L21/66;H01J49/00	主分类号	G01Q30/00
代理机构		代理人
主权项
地址

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