| 摘要 |
PURPOSE: To simplify a unioning process and to reduce its calculation load by processing edge data and controlling a pattern exposure tool. CONSTITUTION: A state machine 50 successively receives an edge from an input edge list 54 together with a priority queue element 52 and outputs the edge data to a plurality of lists 56a-56d. The lists 56a-56d circulate data to the state machine 50 for several times until an edge property is solved and a boundary edge position is detected and is written to an electron beam control data list 60. The state machine 50 examines an edge type, determines whether it is processed by the cartesian method, and maintains a cover count (initialized to 0) being executed to a counter or a register based on the direction of each edge, thus judging whether the edge is visible on scanning and determining the list storing the edge position and an address in the list. |
