POSITION DETECTION DEVICE OF SEMICONDUCTOR SUBSTRATE

摘要

PURPOSE:To shorten the operating time and to enhance the operating efficiency of a device by a method wherein the position of a semiconductor substrate is detected automatically in a teaching operation which sets the position of a substrate transfer machine. CONSTITUTION:A jig 1 whose size is equal to that of a wafer and in which a pin 2 has been installed vertically in the center of a circular plate 10 is placed on a cassette 4 and a boat 5 in a cassette shelf 3, and a reflection-type distance detection sensor 8 which can measure a distance is installed in a substrate transfer machine 7.