发明名称 Optical system for the projection of patterned light onto the surface of three dimensional objects.
摘要 An image projection system for all surfaces of a three dimensional object (7) such as a polyhedron in which direct and angle reflected image patterns are projected from superpositioned non-overlapping mask patterns (5,8) mounted on different levels (3,4) where the separation (S) of the levels is related to the size of the object. the apparatus and process permits simultaneous photolithographic printing of conduc tors on the top and all sides of a cube shaped stack of integrated circuit chips. <IMAGE>
申请公布号 EP0643335(A1) 申请公布日期 1995.03.15
申请号 EP19940110626 申请日期 1994.07.07
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 COTEUS, PAUL WILLIAM;GOODMAN, DOUGLAS SEYMORE
分类号 G03F7/20;G03F7/24;H01L21/027 主分类号 G03F7/20
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