| 摘要 |
<p>A turbomolecular stage positioned at the inlet end of the pump and comprising a stator (6) formed from an array of stationary blades (7) and a rotor (8) formed from a further array of blades (8) arranged for rotation at high speed between the stator blades (7), and a molecular drag stage positioned at the outlet (high pressure) end of the pump and comprising at least two discs (14,15,16,17) arranged for rotation within a stator (9) with a minimal clearance between the circumferential edge of the discs (14,15,16,17) and the stator (9), a flow passageway linking the turbomolecular stage with annular channels defined between the stator and opposing faces of the discs, and means for deflecting gas being pumped from the annular channels during rotation of the discs. <IMAGE></p> |
