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经营范围
发明名称
Plasma processing apparatus
摘要
申请公布号
GB2244371(B)
申请公布日期
1995.03.15
申请号
GB19910006615
申请日期
1991.03.28
申请人
* FUJI ELECTRIC CO LTD
发明人
KIYOSHI * OHIWA
分类号
H05H1/46;C23C16/50;C23C16/511;C23F4/00;H01J37/32;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H01J37/32
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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