| 摘要 |
PURPOSE:To obtain a novel producing method of a powdery crystalline silicon nitride high in the ratio of (specific surface area)/(oxygen content) (equal to above 8m<2>/(g.wt.%)) and excellent in sintering activity. CONSTITUTION:In the producing method of the powdery silicon nitride by synthesizing a nitrogen containing silane compound by the reaction of silane halide with liquid ammonium and decomposing by heating, a mixture of two or more kinds of silane halide is used as a starting raw material. |
