发明名称 NECK DETECTION METHOD IN BONDING WIRE INSPECTION
摘要 PURPOSE:To realize a more accurate neck detection method. CONSTITUTION:An axis, an angle theta of inclination, and a center of gravity (Xd, Yd) of a wire image are calculated (104), and a width th)of a wire along the obtained axis of the wire image is obtained (106). A displacement DELTAX in a direction of X corresponding to a crushing length LP is calculated (110), and the width(h)of wire is retrieved (112) at two points set up DELTAX apart from each other along a direction of X. When the absolute value of a difference between the widths(h)of wire at two points obtained by retrieval is smaller than a prescribed value DELTAh, either of the two points is detected as the center of a neck (108), and it is Judged basing on the coordinates (X, Y) of the center of the neck that a bonding operation is normally carried out or not (116 to 120). As a neck is detected basing on a crushing length LP of wire determined depending on the size of a bonding tool and a relation that a neck of wire and the crushing width of wire at its tail are nearly equal to each other, the position of the neck of wire can be more accurately detected as compared with a conventional method wherein a neck is detected basing on its external shape.
申请公布号 JPH0766262(A) 申请公布日期 1995.03.10
申请号 JP19930209378 申请日期 1993.08.24
申请人 TOYOTA MOTOR CORP 发明人 WATANABE TOMOYUKI;NISHIKAWA KENJI;HASHIMOTO TOSHIO
分类号 H01L21/60;H01L21/66 主分类号 H01L21/60
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