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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0766396(A)
申请公布日期
1995.03.10
申请号
JP19930210789
申请日期
1993.08.26
申请人
FUJITSU LTD
发明人
HONDA TAKUYA
分类号
H01L29/78;H01L21/336;(IPC1-7):H01L29/78
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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