发明名称 Semiconductor device and method for producing the same
摘要 A semiconductor device which can prevent diffusion of an impurity contained in a gate electrode, and a method for producing the same are obtained. In the case of this semiconductor device, a gate oxide film (36) and a p<+>-type gate electrode (35), which are formed on a p-type silicon substrate (1), are doped with nitrogen. <IMAGE>
申请公布号 DE4430366(A1) 申请公布日期 1995.03.09
申请号 DE19944430366 申请日期 1994.08.26
申请人 MITSUBISHI DENKI K.K., TOKIO/TOKYO, JP 发明人 KUROI, TAKASHI, ITAMI, HYOGO, JP;UENO, SHUICHI, ITAMI, HYOGO, JP;ODA, HIDEKAZU, ITAMI, HYOGO, JP;SHIMIZU, SATOSHI, ITAMI, HYOGO, JP
分类号 H01L21/28;H01L21/336;H01L21/8238;H01L21/8247;H01L27/092;H01L27/115;H01L29/08;H01L29/49;H01L29/51;H01L29/78;H01L29/786;H01L29/788;H01L29/792;(IPC1-7):H01L29/772;H01L27/088;H01L21/823 主分类号 H01L21/28
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