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发明名称
摘要
申请公布号	JPH0722111(B2)	申请公布日期	1995.03.08
申请号	JP19870103035	申请日期	1987.04.28
申请人		发明人
分类号	H01J37/06;G11B9/10;H01J37/305;H01L21/027;H01L21/30;H01L21/66;(IPC1-7):H01L21/027	主分类号	H01J37/06
代理机构		代理人
主权项
地址

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