发明名称 |
SUBSTRATE HOUSING CASE |
摘要 |
<p>PURPOSE:To provide part or all of a storage case with a charging preventing effect without impairing its intrinsic function of dust prevention and without creating any source of dust. CONSTITUTION:A U-shaped side member 2 is mounted on a metal base plate 1. A top lid 4 is attached to the side member 2 via a hinge 3 to make it freely open and shut. A front lid 6 is mounted on the top lid 4 via a hinge 5 to make it freely open and shut. By closing the top lid 4 on the side member 2 to close the front lid 6 in a condition of a reticle being placed on the side member 2, the reticle is housed. The side member 2 comprises a material forming a conductive copolymer in a modified PPE and the top lid 4 comprises a transparent and conductive material.</p> |
申请公布号 |
JPH0758192(A) |
申请公布日期 |
1995.03.03 |
申请号 |
JP19930200808 |
申请日期 |
1993.08.12 |
申请人 |
NIKON CORP;SENDAI NIKON:KK |
发明人 |
NAKAHARA KANEFUMI;ORIGASA TSUNEAKI |
分类号 |
H01L21/027;H01L21/673;H01L21/68;(IPC1-7):H01L21/68 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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