发明名称 SUBSTRATE HOUSING CASE
摘要 <p>PURPOSE:To provide part or all of a storage case with a charging preventing effect without impairing its intrinsic function of dust prevention and without creating any source of dust. CONSTITUTION:A U-shaped side member 2 is mounted on a metal base plate 1. A top lid 4 is attached to the side member 2 via a hinge 3 to make it freely open and shut. A front lid 6 is mounted on the top lid 4 via a hinge 5 to make it freely open and shut. By closing the top lid 4 on the side member 2 to close the front lid 6 in a condition of a reticle being placed on the side member 2, the reticle is housed. The side member 2 comprises a material forming a conductive copolymer in a modified PPE and the top lid 4 comprises a transparent and conductive material.</p>
申请公布号 JPH0758192(A) 申请公布日期 1995.03.03
申请号 JP19930200808 申请日期 1993.08.12
申请人 NIKON CORP;SENDAI NIKON:KK 发明人 NAKAHARA KANEFUMI;ORIGASA TSUNEAKI
分类号 H01L21/027;H01L21/673;H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/027
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