| 摘要 |
<p>PURPOSE:To specify a defective piezoelectric element in the inspection method of a piezoelectric laminated body. CONSTITUTION:When a defect such as a crack or the like is caused in a piezoelectric actuator 1 and a microdischarge is caused by the defect, a discharge amount is increased by a laser. As a result, while a constant voltage is being applied across external electrodes 1d, 1e, the piezoelectric actuator 1 is irradiated with the laser so as to be movable in a lamination direction, and a change in a current value across the external electrodes 1d, 1e is measured. Thereby, a defective piezoelectric element is specified.</p> |
