| 摘要 |
<p>A multipurpose chuck apparatus (100) has a chamber (112) for holding a medium (114). The medium (114) is heated into a high temperature molten state by a radio frequency induction heating coil (130). The medium (114) heats up a semiconductor material (118) through a chuck member (116) that separates the medium (114) from the semiconductor material (118). The heating performed by the radio frequency induction heating coil (130) generates a fluid flow within the medium (114), providing a uniform temperature distribution throughout the medium (114). A magnetic rotation device (144, 146) controls movement of rotating member (121) having a mixing member (122) and rotating fins (184, 186) to ensure complete uniform temperature distribution throughout the medium (114), especially in the vicinity of the chuck member (116). An inlet cooling tube (122) and an outlet cooling tube (124), isolated from the medium (114) provide cooling fluid to the chuck member (116) for temperature control of the semiconductor material (118). <IMAGE></p> |
