发明名称 |
APPARATUS FOR PRODUCING QUARTZ GLASS CRUCIBLE |
摘要 |
<p>PURPOSE:To provide a method for producing quartz crucible capable of improving the yield of pulling up an Si single crystal. CONSTITUTION:This apparatus is provided with a crucible supporting and rotating means 20 which supports the inside surface of the crucible 1 in the inverted state and rotates the crucible around its central axis at a low speed and is provided with a grinding wheel rotating and moving means 21 which moves the grinding wheel 16 having a prependicularly held revolving shaft along the outer side of the crucible 1 while rotating the grinding wheel 16 at a high speed. The grinding wheel 16 has a grinding surface which is rounded on, at least, the lower side so that the entire part of the outside surface of the crucible 1 is grounded by the grinding wheel 16.</p> |
申请公布号 |
JPH0753227(A) |
申请公布日期 |
1995.02.28 |
申请号 |
JP19930216909 |
申请日期 |
1993.08.10 |
申请人 |
TOSHIBA CERAMICS CO LTD;T K X:KK |
发明人 |
KAWAMURA TAKAFUMI;KOSEKI TADAO;ITO NAOE;KORIKI KAZUHIKO;YOKOBORI GIICHI;HORI YOSHIMICHI |
分类号 |
C30B15/10;C03B20/00;(IPC1-7):C03B20/00 |
主分类号 |
C30B15/10 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|