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发明名称
Plasmareaktor for en avsetnings- eller etsingsprosess
摘要
申请公布号
NO943139(A)
申请公布日期
1995.02.28
申请号
NO19940003139
申请日期
1994.08.25
申请人
ALCATEL CIT, SA
发明人
PEARSON, DAVID
分类号
C23F4/00;H01J37/32;H01L21/205;H01L21/302;H05H1/46;(IPC1-7):H05H1/46
主分类号
C23F4/00
代理机构
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