DEVICE FOR INDEXING MAGAZINE COMPARTMENTS AND WAFER-SHAPED OBJECTS IN THE COMPARTMENTS.

摘要

PCT No. PCT/EP94/00620 Sec. 371 Date Nov. 3, 1994 Sec. 102(e) Date Nov. 3, 1994 PCT Filed Mar. 3, 1993 PCT Pub. No. WO94/20979 PCT Pub. Date Sep. 15, 1994A device for indexing magazine compartments of a magazine and wafer-shaped objects contained therein to ensure precise access of the removing and charging device in any given predetermined plane of the magazine regardless of dimensional tolerances. An optoelectronic sensor having a transmitter and receiver emits a bundle of measurement rays to detect the position of the wafer-shaped objects as well as the position of the magazine compartments relative to a reference plane whose location is rigidly defined by design with respect to a first handling plane for removing and charging. The magazine is adjustable vertically in a measurable manner for removal and charging by a magazine seat via a magazine lift. The device is applicable in the manufacture of integrated circuits, in particular for handling wafer-shaped objects.