发明名称 Methods for fabricating three-dimensional micro structures
摘要 A method for producing a three-dimensional object includes the steps of providing an interface plane within a chamber and generating a beam of radiant energy having varied levels of beam energy density. The beam is directed to selectively expose a pattern of address points on the interface plane to the beam of radiant energy for a limited duration. Conditions are established in the chamber to enable the beam to induce a micro-chemical reaction at the interface plane at a rate which serves to form a portion of the three-dimensional object. A significant feature of the invention is that the micro-chemical reaction is substantially binary with respect to the beam energy density. That is, the reaction is either substantially "on" or substantially "off.
申请公布号 US5389196(A) 申请公布日期 1995.02.14
申请号 US19920828247 申请日期 1992.01.30
申请人 MASSACHUSETTS INSTITUTE OF TECHNOLOGY 发明人 BLOOMSTEIN, THEODORE M.;EHRLICH, DANIEL;FLYNN, ANITA M.
分类号 B23K26/36;B29C67/00;G02B6/136;H01L41/09;(IPC1-7):H01L21/00 主分类号 B23K26/36
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