| 摘要 |
PURPOSE:To correct the surface of a lapping surface reference board with good precision easily by furnishing a control means, which controls a correcting means on the basis of the result from a plane accuracy measuring means for lapping surface reference board, and adjusting the position, contacting pressure, and revolving speed of a grinder element with respect to the lapping surface reference board. CONSTITUTION:The plane accuracy of the surface of a lapping surface reference board is measured on the basis of output signals from a plurality of distance sensors 19 mounted in a plane accuracy measuring means 12, the locational relationship of these sensors, and the rotating angle position of the lapping surface reference board 11. The result from this plane accuracy measuring means is fed into a control means 14, and a correcting means 13 is accordingly driven to adjust the position, contacting pressure, and revolving speed of a corrective grinder element 37 relative to the lapping surface reference board 11. This allows the corrective grinder element 37 to make precision polishing of any point on the surface of the lapping surface reference board 11 in any desired amount to provide a corrected surface of lapping surface reference board 11, which accomplishes high precision lapping of work at all times. |
