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发明名称
Mixed aldehyde novolak resins and high contrast high thermal stability positive photoresists prepared therefrom.
摘要
申请公布号
EP0336604(B1)
申请公布日期
1995.02.08
申请号
EP19890302864
申请日期
1989.03.22
申请人
HOECHST CELANESE CORPORATION
发明人
LAZARUS, RICHARD MICHAEL;KAUTZ, RANDALL WILLIAM;DIXIT, SUNIT SURESH
分类号
G03F7/022;C08G8/00;C08G8/04;C08G8/10;G03F7/023;H01L21/027;H01L21/30;H05K3/00;H05K3/06;(IPC1-7):C08G8/04;G03F7/00
主分类号
G03F7/022
代理机构
代理人
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