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发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH0734242(A)
申请公布日期
1995.02.03
申请号
JP19930176456
申请日期
1993.07.16
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
OKUDA AKIRA;GOTO CHIKAKO
分类号
C23C14/34;C23C14/38;C23C14/40;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
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地址
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