发明名称 |
Method and apparatus for changing the imaging scale in X-ray lithograph |
摘要 |
Am improved method for changing the image scale for a lithographic arrangement comprising a synchroton radiation creating a collimated beam of x-radiation passing through a mask onto an object to be structured, characterized by deforming the surface to be structured into a curved surface. The deforming into a curved surface can be either into a cylindrical curved surface or into a spherical curved surface.
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申请公布号 |
US4887282(A) |
申请公布日期 |
1989.12.12 |
申请号 |
US19870119094 |
申请日期 |
1987.11.10 |
申请人 |
SIEMENS AKTIENGESELLSCHAFT |
发明人 |
MUELLER, KARL-HEINZ |
分类号 |
G21K5/02;G03F7/20;H01L21/027 |
主分类号 |
G21K5/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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