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经营范围
发明名称
HEAT TREATMENT EQUIPMENT
摘要
申请公布号
JPH0729912(A)
申请公布日期
1995.01.31
申请号
JP19930195508
申请日期
1993.07.12
申请人
DAINIPPON SCREEN MFG CO LTD
发明人
SASAKI KIYOHIRO
分类号
H01L21/22;H01L21/324;(IPC1-7):H01L21/324
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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