MANUFACTURE OF SEMICONDUCTOR,申请号JP19930175738-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR
摘要
申请公布号	JPH0729898(A)	申请公布日期	1995.01.31
申请号	JP19930175738	申请日期	1993.07.15
申请人	OMI TADAHIRO	发明人	OMI TADAHIRO
分类号	C23C14/10;C23C14/08;C23C14/24;C30B25/14;H01L21/31;H01L21/316;(IPC1-7):H01L21/31	主分类号	C23C14/10
代理机构		代理人
主权项
地址

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