Positioning table for precision machine tool - with horizontally displaced table surface and table support mounted in horizontal bearings

摘要

The positioning table has a table surface, supported for movement in a horizontal plane relative to a support, which is supported in turn by magnetic bearings to allow movement about 5 axes. The table surface is displaced horizontally under control of a linear motor, the support received vertically by a vacuum chamber (3) and coupled to an external via a flexible hollow coupling element ensuring the integrity of the vacuum. A control device regulates the current which is fed to the magnetic bearings. ADVANTAGE - Increased positioning accuracy.