| 摘要 |
PURPOSE:To set parts with a high precision by preliminarily measuring the difference of position information and correcting position information which is commanded to move the XY table at the time of setting the parts. CONSTITUTION:A prescribed position of an XY table 2 is moved under a detecting part 6 and is detected by the detecting part 6, and a control part 5 records the difference between position information of actual movement of the XY table 2 and position information which is commanded to a motor to move the XY table 2. Next, the XY table 2 is moved by a certain extent, and the difference between position information of actual movement of the XY table 2 and position information which is commanded to the motor to move the XY table 2 is recorded. Thereafter, designated setting position information of the XY table 2 is corrected by the difference between stored position information of actual movement of the XY table 2 and position information which is commanded to the motor to move the XY table, and the XY table 2 is moved to a normal position based on this setting position information to set the parts. |
