CELL TYPE MOBIL RADIO SYSTEM AND FIXED STATION FOR THIS MOBILE RADIO SYSTEM AS WELL AS EVALUATION CONTROLLER

摘要

PURPOSE:To locally form a film by irradiating an ion beam of an arbitrary direction by forming a scanning direction rotation signal generator in an ion beam scan signal generating route to rotatably move a secondary charged particle image at an arbitrary angle. CONSTITUTION:An ion beam generated and scanned by ion beam generators 1-6 is irradiated on a sample 9. A metal vapor is blown from a gas gun 8 upon irradiation to a film forming position. Secondary charged particles radiated from the sample 9 are detected by a detector 10, amplified by a signal amplifying processor 11 to become an intensity signal, input to a display 12 together with a scan signal from a scan controller 13, and displayed on a secondary charged particle image. A position to be formed with a metal pattern film on the sample 9 by the image is searched, the image is rotatably moved by a scanning direction rotation signal generator 15, a region to be formed with the metal pattern image is set by a scanning range setter 14 to form the film.