PROCESS FOR MANUFACTURING MULTI-LAYER GLASS CERAMIC SUBSTRATE

摘要

A process for manufacturing a multi-layer glass ceramic substrate comprises the steps of forming green sheets containing ceramic powder and glass powder as main ingredients, laminating the green sheets, and firing the laminated green sheets to form a multi-layer glass ceramic substrate. At least one green sheet contains porous glass powder as part of the glass powder component to control the shrinkage of the green sheets and prevent cracks or delamination. Such green sheets containing porous glass powder are preferably comprised by a signal layer which is made up of intermediate sheets of a laminate formed from the green sheets and having an interconnection layer formed on each thereof. The signal layer is sandwiched between upper and lower green sheets which contain ceramic powders and glass powders and constitute the remainder of the laminate.