| 摘要 |
PURPOSE:To concurrently perform various kinds of working while fitting work to an working object by constituting a mount so that the surroundings of the working object can be moved on a solid surface including the rotation surface of the working object and the movement of devices fitted to the mount can be concentrated on the working object. CONSTITUTION:Mounts 5-8 of devices 3 and 4 necessary to work such as observation, analysis, and working, etc., are supported via track members (rail) 10-15 for movably guiding the mounts 5-8 so that they can be moved on a solid surface including a rotation surface around a worked object 9, and the respective mounts 5-8 are driven by a driving means while ensuring a working space 16 in the middle. That is, an observing device, an analyzing device, and various working tools are provided so as to be concentrated on the worked object 9 in the middle. The worked object 9 is loaded on a working stage 17 vertically movable on a Z axis an horizontally movable on a X-Y axis. Such a working system is preferably housed in a chamber 18 constituting a closed surface wherein a working atmosphere can be changed. |
