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经营范围
发明名称
PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0684924(A)
申请公布日期
1994.03.25
申请号
JP19920233452
申请日期
1992.09.01
申请人
MITSUBISHI ELECTRIC CORP
发明人
SATO KATSUMI
分类号
H01L21/322;H01L29/74;(IPC1-7):H01L21/322
主分类号
H01L21/322
代理机构
代理人
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