High heat conductive insulated substrate and method of manufacturing the same.

摘要

A high heat conductive insulated substrate comprising a substrate having a heat conductivity of not less than 50 W/m.k and a high heat conductive insulating layer coated on the substrate; and a method for producing such a high heat conductive insulated substrate by forming an insulating layer on a substrate by applying DC voltage and RF power to the substrate and providing magnetic field parallel to the surface of the substrate, are disclosed. The insulated substrate of the present invention has a good heat conductivity, a good thermal resistance and a smooth surface, whereby exfoliation of the film layer can be prevented.