发明名称 |
Temperature cycling ceramic electrostatic chuck. |
摘要 |
<p>An electrostatic chuck 8 assembly includes, from top to bottom: a top isolation layer 42; an electrostatic pattern layer 44 comprised of an electrically conductive electrostatic pattern 46 disposed on a substrate 45; a heating layer 50 comprised of an electrically conductive heating pattern 54 disposed on a substrate; a support 60; and, a heat sink base 70 having backside cooling and insulating channels 78, 80 provided therein. <IMAGE></p> |
申请公布号 |
EP0512936(B1) |
申请公布日期 |
1995.01.25 |
申请号 |
EP19920480058 |
申请日期 |
1992.04.07 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
LOGAN, JOSEPH SKINNER;RUCKEL, RAYMOND ROBERT;TOMPKINS, ROBERT ELI;WESTERFIELD, ROBERT PETER, JR. |
分类号 |
B23Q3/15;B23Q11/14;H01L21/683;H02N13/00;(IPC1-7):H01L21/00 |
主分类号 |
B23Q3/15 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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