发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要 PURPOSE:To obtain a highly reliable semiconductor device of a structure, where in a coverage ratio of a metal wiring in contact holes is improved. CONSTITUTION:A semiconductor device is constituted of a semiconductor substrate 1, an interlayer oxide film 4 provided on this substrate 1, contact holes 5 which penetrate this film 4 and are bored on the substrate 1, sidewalls 20, which are provided in these holes 5 and have the same conductivity type as that of diffused layers 2a and 2b to be brought into contact in the substrate 1, and a metal wiring 6A connected with the layers 2a and 2b via the holes 5, in which these sidewalls 20 are provided.
申请公布号 JPH0722346(A) 申请公布日期 1995.01.24
申请号 JP19930164584 申请日期 1993.07.02
申请人 MITSUBISHI ELECTRIC CORP 发明人 MOMOTAKE YASUHITO
分类号 H01L21/28;H01L21/3205;H01L21/768;H01L21/8242;H01L23/522;H01L27/10;H01L27/108 主分类号 H01L21/28
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