ACTIVE MATRIX SUBSTRATE AND ITS PRODUCTION

摘要

PURPOSE:To produce the active matrix substrate having TFTs for display which are small in leakage current due to photovoltaic power and TFTs for driving which is high in mobility and small in variation with high productivity. CONSTITUTION:A display part 20 and a driving circuit part 10 are formed on an insulating substrate 1. The TFTs for driving formed on this driving circuit part 10 are subjected to a hydrogenation treatment and the TFTs 23 for display formed in the display part 20 are not subjected to the hydrogenation treatment. This active matrix substrate is produced by (1) forming an insulating film contg. hydrogen on the polycrystalline semiconductor layer of the TFTs for driving and subjecting the entire part of the substrate to a heat treatment to diffuse the hydrogen included into the insulating layer into the polycrystalline semiconductor layer of the TFTs for driving; or (2) forming a mask on the display part and exposing the entire part of the substrate into an electric discharge of gas contg. the hydrogen to diffuse hydrogen into the polycrystalline semiconductor layer of the TFTs for driving.