ACCELERATION SENSOR AND FABRICATION THEREOF

摘要

PURPOSE:To protect a silicon substrate against fracture due to the pressure difference between the inside of a recess in an insulating substrate and the outside thereof when a silicon wafer bonded onto the insulating substrate is subjected to dry etching in a low pressure vessel at the time of fabricating an acceleration sensor. CONSTITUTION:An air vent 22B is formed between a silicon wafer and a recess 22A in a glass substrate 22 in order to communicate the recess 22A to the side face of the glass substrate 22. Since the gas in the recess 22 is discharged through the air vent 22B, a fixed part 23 and a mass part 27 are separated from the silicon wafer by dry etching and the silicon wafer is protected against fracture due to the pressure in the recess 22A during formation of an acceleration sensor 21.