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发明名称
DRY ETCHING METHOD
摘要
申请公布号
JPH0722396(A)
申请公布日期
1995.01.24
申请号
JP19930151957
申请日期
1993.06.23
申请人
SONY CORP
发明人
TATSUMI TETSUYA
分类号
H01L21/28;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
H01L21/28
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代理人
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