SILICON NITRIDE CERAMIC SUBSTRATE AND USE THEREOF

摘要

PURPOSE:To provide a silicon nitride ceramic substrate having low thermal resistance and suitable for use as a substrate for a thyristor and a ceramic substrate with a copper circuit remarkably excellent in durability to thermal shocks and heat history. CONSTITUTION:The objective silicon nitride ceramic substrate has <=0.20 deg.C/W thermal resistance. A copper circuit is, formed on one side of this silicon nitride ceramic substrate and a copper sheet having an area nearly equal to that of the substrate is joined to the other side to obtain the objective ceramic substrate with the copper circuit.