发明名称 HEAT TREATING DEVICE
摘要 PURPOSE:To provide a heat treating device having a construction capable of preventing the failure of heating resistors by wirings for power feeding. CONSTITUTION:The ends 30d of the heating resistors 30 extended to an outer side from heat insulating materials 34 and terminals 46 of junction terminal members 44 of a power source for power feeding are connected by junction members 41 consisting of lightweight members. The excessive generation of load in the heating resistors 30 does not, therefore, arise. In addition, the junction members 42 mounted on the heating resistor 30 side are maintained in a tight contact state by clamping members 48 having a habit to be closed by their own elasticity. Operating and clamping members 50 used in the case of mounting of these clamping members 48 are attachable and detachable to and from the clamping members 48 and, therefore, the interference of the adjacent clamping members 50 with each other is eliminated by removing the clamping members 50 after mounting the members on the clamping members 48, by which the spacings between the ends 30d are diminished and the range where the heating by the heating resistors 30 is not executed is lessened.
申请公布号 JPH0718445(A) 申请公布日期 1995.01.20
申请号 JP19930191927 申请日期 1993.07.06
申请人 TOKYO ELECTRON LTD;TOKYO ELECTRON TOHOKU LTD 发明人 MONOE OSAMU
分类号 C23C16/44;H01L21/22;H01L21/324;H05B3/64;H05B3/66;(IPC1-7):C23C16/44 主分类号 C23C16/44
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