| 摘要 |
PURPOSE:To produce a dense aluminum nitride sintered compact high in heat conductivity by mixing CaF2 and YF3 to Al powder as a sintering assistant, compacting the mixture and sintering the compact in the presence of carbon on the surface of the compact body. CONSTITUTION:A compact is produced by mixing calcium fluoride (CaF2) and yttrium fluoride (YF3) as the sintering assistant by 0.5-5.0wt.% in total of them to aluminum nitride powder. Then an objective sintered compact is obtained by sintering the compact in the presence of carbon on the surface of the compact. The average grain size of the aluminum nitride powder to be used is preferably <=5mum so as to obtain the sintered compact of high density at <=1700 deg.C sintering temp., and the average grain size of CaF2 and YF3 to be added as the sintering assistant is preferably <=20mum so as to proceed with the sintering smoothly, and the molar ratio (CaF2/YF3) of the CaF2 and the YF3 is preferably (1/99)-(75-25). |
